JT Baker® 0264-05 Phosphoric Acid, 85-87%, CMOS Electronic Grade (Case of 4 x 14-Lb Poly Bottles)
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- Appearance : Colorless liquid
- Trace Impurity Level : 200 to 10ppb
- pH : 1.5 (3.27 g/l, 20 °C)
- Solublity in water : Miscible
- Case of 4 x 14-Lb Poly Bottles
- Manufacturer Part No: JT-0264-05
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Details
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
Typical Monograph Analysis
 |  |  |
| Assay (H3PO4) (by acidimetry) | 85.0 - 87.0 % | 86.5 % |
| Color (APHA) | 10 max. | 5 |
| Color after Heating | Passes Test | Passes Test |
| Specific Gravity at 60°/60°F | 1.691 - 1.710 | 1.708 |
| Reducing Substances | Passes Test | Passes Test |
| Volatile Acids (ueq/g) | 0.16 max. | 0.16 |
| Chloride (Cl) | 1 ppm max. | < 0.5 ppm |
| Nitrate (NO3) | 2 ppm max. | < 1.5 ppm |
| Sulfate (SO4) | 12 ppm max. | < 4 ppm |
| Trace Impurities (in ppm): | ||
| Aluminum (Al) | 0.5 max. | < 0.02 |
| Antimony (Sb) | 10 max. | < 0.3 |
| Arsenic (As) | 0.05 max. | < 0.03 |
| Calcium (Ca) | 1.5 max. | < 0.2 |
| Chromium (Cr) | 0.2 max. | < 0.02 |
| Cobalt (Co) | 0.05 max. | < 0.01 |
| Copper (Cu) | 0.05 max. | < 0.01 |
| Gold (Au) | 0.3 max. | < 0.03 |
| Heavy Metals (as Pb) | 5 max. | < 3 |
| Iron (Fe) | 2 max. | < 0.04 |
| Lead (Pb) | 0.3 max. | 0.01 |
| Lithium (Li) | 0.1 max. | < 0.03 |
| Magnesium (Mg) | 0.2 max. | < 0.01 |
| Manganese (Mn) | 0.1 max. | < 0.01 |
| Nickel (Ni) | 0.2 max. | < 0.02 |
| Potassium (K) | 1.5 max. | < 0.02 |
| Sodium (Na) | 2.5 max. | < 0.02 |
| Strontium (Sr) | 0.1 max. | < 0.005 |
| Titanium (Ti) | 0.3 max. | < 0.03 |
| Zinc (Zn) | 2 max. | < 0.04 |
| Particle Count, per ml: | ||
| 1.0 um and greater | 10 max. | 1 |
Documents & Videos
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
Typical Monograph Analysis
| | |
| Assay (H3PO4) (by acidimetry) | 85.0 - 87.0 % | 86.5 % |
| Color (APHA) | 10 max. | 5 |
| Color after Heating | Passes Test | Passes Test |
| Specific Gravity at 60°/60°F | 1.691 - 1.710 | 1.708 |
| Reducing Substances | Passes Test | Passes Test |
| Volatile Acids (ueq/g) | 0.16 max. | 0.16 |
| Chloride (Cl) | 1 ppm max. | < 0.5 ppm |
| Nitrate (NO3) | 2 ppm max. | < 1.5 ppm |
| Sulfate (SO4) | 12 ppm max. | < 4 ppm |
| Trace Impurities (in ppm): | ||
| Aluminum (Al) | 0.5 max. | < 0.02 |
| Antimony (Sb) | 10 max. | < 0.3 |
| Arsenic (As) | 0.05 max. | < 0.03 |
| Calcium (Ca) | 1.5 max. | < 0.2 |
| Chromium (Cr) | 0.2 max. | < 0.02 |
| Cobalt (Co) | 0.05 max. | < 0.01 |
| Copper (Cu) | 0.05 max. | < 0.01 |
| Gold (Au) | 0.3 max. | < 0.03 |
| Heavy Metals (as Pb) | 5 max. | < 3 |
| Iron (Fe) | 2 max. | < 0.04 |
| Lead (Pb) | 0.3 max. | 0.01 |
| Lithium (Li) | 0.1 max. | < 0.03 |
| Magnesium (Mg) | 0.2 max. | < 0.01 |
| Manganese (Mn) | 0.1 max. | < 0.01 |
| Nickel (Ni) | 0.2 max. | < 0.02 |
| Potassium (K) | 1.5 max. | < 0.02 |
| Sodium (Na) | 2.5 max. | < 0.02 |
| Strontium (Sr) | 0.1 max. | < 0.005 |
| Titanium (Ti) | 0.3 max. | < 0.03 |
| Zinc (Zn) | 2 max. | < 0.04 |
| Particle Count, per ml: | ||
| 1.0 um and greater | 10 max. | 1 |