JT Baker® 0264-05 Phosphoric Acid, 85-87%, CMOS Electronic Grade (Case of 4 x 14-Lb Poly Bottles)
- Appearance : Colorless liquid
- Trace Impurity Level : 200 to 10ppb
- pH : 1.5 (3.27 g/l, 20 °C)
- Solublity in water : Miscible
- Case of 4 x 14-Lb Poly Bottles
- Manufacturer Part No: JT-0264-05
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Details
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
Typical Monograph Analysis
Assay (H3PO4) (by acidimetry) | 85.0 - 87.0 % | 86.5 % |
Color (APHA) | 10 max. | 5 |
Color after Heating | Passes Test | Passes Test |
Specific Gravity at 60°/60°F | 1.691 - 1.710 | 1.708 |
Reducing Substances | Passes Test | Passes Test |
Volatile Acids (ueq/g) | 0.16 max. | 0.16 |
Chloride (Cl) | 1 ppm max. | < 0.5 ppm |
Nitrate (NO3) | 2 ppm max. | < 1.5 ppm |
Sulfate (SO4) | 12 ppm max. | < 4 ppm |
Trace Impurities (in ppm): | ||
Aluminum (Al) | 0.5 max. | < 0.02 |
Antimony (Sb) | 10 max. | < 0.3 |
Arsenic (As) | 0.05 max. | < 0.03 |
Calcium (Ca) | 1.5 max. | < 0.2 |
Chromium (Cr) | 0.2 max. | < 0.02 |
Cobalt (Co) | 0.05 max. | < 0.01 |
Copper (Cu) | 0.05 max. | < 0.01 |
Gold (Au) | 0.3 max. | < 0.03 |
Heavy Metals (as Pb) | 5 max. | < 3 |
Iron (Fe) | 2 max. | < 0.04 |
Lead (Pb) | 0.3 max. | 0.01 |
Lithium (Li) | 0.1 max. | < 0.03 |
Magnesium (Mg) | 0.2 max. | < 0.01 |
Manganese (Mn) | 0.1 max. | < 0.01 |
Nickel (Ni) | 0.2 max. | < 0.02 |
Potassium (K) | 1.5 max. | < 0.02 |
Sodium (Na) | 2.5 max. | < 0.02 |
Strontium (Sr) | 0.1 max. | < 0.005 |
Titanium (Ti) | 0.3 max. | < 0.03 |
Zinc (Zn) | 2 max. | < 0.04 |
Particle Count, per ml: | ||
1.0 um and greater | 10 max. | 1 |
Documents & Videos
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
Typical Monograph Analysis
Assay (H3PO4) (by acidimetry) | 85.0 - 87.0 % | 86.5 % |
Color (APHA) | 10 max. | 5 |
Color after Heating | Passes Test | Passes Test |
Specific Gravity at 60°/60°F | 1.691 - 1.710 | 1.708 |
Reducing Substances | Passes Test | Passes Test |
Volatile Acids (ueq/g) | 0.16 max. | 0.16 |
Chloride (Cl) | 1 ppm max. | < 0.5 ppm |
Nitrate (NO3) | 2 ppm max. | < 1.5 ppm |
Sulfate (SO4) | 12 ppm max. | < 4 ppm |
Trace Impurities (in ppm): | ||
Aluminum (Al) | 0.5 max. | < 0.02 |
Antimony (Sb) | 10 max. | < 0.3 |
Arsenic (As) | 0.05 max. | < 0.03 |
Calcium (Ca) | 1.5 max. | < 0.2 |
Chromium (Cr) | 0.2 max. | < 0.02 |
Cobalt (Co) | 0.05 max. | < 0.01 |
Copper (Cu) | 0.05 max. | < 0.01 |
Gold (Au) | 0.3 max. | < 0.03 |
Heavy Metals (as Pb) | 5 max. | < 3 |
Iron (Fe) | 2 max. | < 0.04 |
Lead (Pb) | 0.3 max. | 0.01 |
Lithium (Li) | 0.1 max. | < 0.03 |
Magnesium (Mg) | 0.2 max. | < 0.01 |
Manganese (Mn) | 0.1 max. | < 0.01 |
Nickel (Ni) | 0.2 max. | < 0.02 |
Potassium (K) | 1.5 max. | < 0.02 |
Sodium (Na) | 2.5 max. | < 0.02 |
Strontium (Sr) | 0.1 max. | < 0.005 |
Titanium (Ti) | 0.3 max. | < 0.03 |
Zinc (Zn) | 2 max. | < 0.04 |
Particle Count, per ml: | ||
1.0 um and greater | 10 max. | 1 |