KMG Electronic Chemicals 064081 Phosphoric Acid 85%, MegaBit Grade, 1 Gallon Poly Bottle with Vented Cap (Case of 4)
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- MegaBit Grade 85% phosphoric acid manufactured to parts-per-billion trace impurities
- Assay (H3PO4): 85 to 87%; APHA Color: 7
- Insoluble Matter: 20,000ppb; Volatile Acids: 0.160 μeq/g
- Heavy Metals: 5,000ppb
- Trace impurities measured in PPB. See "Documents" sub-tab below for "Product Datasheet" link.
- Case of 4 x 1 Gallon Poly Bottles with Vented Caps
- Manufacturer Part No: 064081
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Details
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
Documents & Videos
Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.