Versum Materials ACT® NE-14 Etch Residue Remover & Positive Photoresist Stripper (Case of 4 x 1-Gallons)
Please see the TECHNICAL DATASHEET for ACT® NE-14 Etch Residue Remover & Positive Photoresist Stripper located in the "Documents" sub-tab below.
- Specifically designed for use as a etch residue remover or positive photoresist stripper.
- Specially formulated chemistry designed for removal of organic and highly oxidized etch residues.
- Also an excellent option for controled etching of contaminated oxide surfaces including through-silicon vias and sidewalls.
- May also be used in both copper and aluminum applications.
- Extremely low etch rates on most sensitive materials including Copper, Aluminum, Titanium and Tungsten.
- Case of 4 x 1-Gallons (Cases Only)
- Manufacturer Part No: ACTNE-14
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Details
ACT®: NE‐14 Etch Residue Remover and Positive Photoresist Stripper is a fluoride–containing chemistry specially formulated for removal of organic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces, including through‐silicon vias and sidewalls. This product may also be used in aluminum and copper applications.
Documents & Videos
ACT®: NE‐14 Etch Residue Remover and Positive Photoresist Stripper is a fluoride–containing chemistry specially formulated for removal of organic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces, including through‐silicon vias and sidewalls. This product may also be used in aluminum and copper applications.