Versum Materials ACT® NE-14 Etch Residue Remover & Positive Photoresist Stripper (Case of 4 x 1-Gallons)

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Please see the TECHNICAL DATASHEET for ACT® NE-14 Etch Residue Remover & Positive Photoresist Stripper located in the "Documents" sub-tab below.
  • Specifically designed for use as a etch residue remover or positive photoresist stripper.
  • Specially formulated chemistry designed for removal of organic and highly oxidized etch residues.
  • Also an excellent option for controled etching of contaminated oxide surfaces including through-silicon vias and sidewalls.
  • May also be used in both copper and aluminum applications.
  • Extremely low etch rates on most sensitive materials including Copper, Aluminum, Titanium and Tungsten.
  • Case of 4 x 1-Gallons (Cases Only)
  • Manufacturer Part No: ACTNE-14
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Item Number: VM-ACT-NE-14

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ACT®: NE‐14 Etch Residue Remover and Positive Photoresist Stripper is a fluoride–containing chemistry specially formulated for removal of organic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces, including through‐silicon vias and sidewalls. This product may also be used in aluminum and copper applications.

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ACT®: NE‐14 Etch Residue Remover and Positive Photoresist Stripper is a fluoride–containing chemistry specially formulated for removal of organic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces, including through‐silicon vias and sidewalls. This product may also be used in aluminum and copper applications.

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