JT Baker® 0274-11 Phosphoric Acid, 85%, CMOS Electronic Grade, 700Lb Poly Drum

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Item Number: JTB-0274-11



Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.

Typical Analysis Monograph

Assay (H3PO4) (by acidimetry) 85.0 - 87.0 %
Color (APHA) 10 max.
Color after Heating Passes Test
Specific Gravity at 60°/60°F 1.691 - 1.710
Reducing Substances Passes Test
Volatile Acids (ueq/g) 0.16 max.
Chloride (Cl) 1 ppm max.
Nitrate (NO3) 2 ppm max.
Sulfate (SO4) 12 ppm max.
Trace Impurities (in ppm):
Aluminum (Al) 0.5 max.
Antimony (Sb) 10 max.
Arsenic (As) 0.05 max.
Calcium (Ca) 1.5 max.
Chromium (Cr) 0.2 max.
Cobalt (Co) 0.05 max.
Copper (Cu) 0.05 max.
Gold (Au) 0.3 max.
Heavy Metals (as Pb) 5 max.
Iron (Fe) 2 max.
Lead (Pb) 0.3 max.
Lithium (Li) 0.1 max.
Magnesium (Mg) 0.2 max.
Manganese (Mn) 0.1 max.
Nickel (Ni) 0.2 max.
Potassium (K) 1.5 max.
Sodium (Na) 2.5 max.
Strontium (Sr) 0.1 max.
Titanium (Ti) 0.3 max.
Zinc (Zn) 2 max.
For Microelectronic Use

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