JT Baker® 0274-11 Phosphoric Acid, 85%, CMOS Electronic Grade, 700Lb Poly Drum

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  • Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.
  • CMOS™ Grade
  • Trace Impurity Level: 200 to 10ppb
  • SEMI Grade: 1
  • Trace impurities measured in PPB. See "Documents" sub-tab below for "Product Datasheet" link.
  • 700Lb Poly Drum
  • Manufacturer: Avantor
  • Manufacturer Part No: JT-0274-11
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Item Number: JTB-0274-11
$5,381.29

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Details

Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.

Typical Analysis Monograph

Assay (H3PO4) (by acidimetry) 85.0 - 87.0 %
Color (APHA) 10 max.
Color after Heating Passes Test
Specific Gravity at 60°/60°F 1.691 - 1.710
Reducing Substances Passes Test
Volatile Acids (ueq/g) 0.16 max.
Chloride (Cl) 1 ppm max.
Nitrate (NO3) 2 ppm max.
Sulfate (SO4) 12 ppm max.
Trace Impurities (in ppm):
Aluminum (Al) 0.5 max.
Antimony (Sb) 10 max.
Arsenic (As) 0.05 max.
Calcium (Ca) 1.5 max.
Chromium (Cr) 0.2 max.
Cobalt (Co) 0.05 max.
Copper (Cu) 0.05 max.
Gold (Au) 0.3 max.
Heavy Metals (as Pb) 5 max.
Iron (Fe) 2 max.
Lead (Pb) 0.3 max.
Lithium (Li) 0.1 max.
Magnesium (Mg) 0.2 max.
Manganese (Mn) 0.1 max.
Nickel (Ni) 0.2 max.
Potassium (K) 1.5 max.
Sodium (Na) 2.5 max.
Strontium (Sr) 0.1 max.
Titanium (Ti) 0.3 max.
Zinc (Zn) 2 max.
For Microelectronic Use

Documents

Phosphoric acid is used in silicon nitride etching. It is also used in aluminum etch, in which the phosphoric acid acts to dissolve aluminum oxide.

Typical Analysis Monograph

Assay (H3PO4) (by acidimetry) 85.0 - 87.0 %
Color (APHA) 10 max.
Color after Heating Passes Test
Specific Gravity at 60°/60°F 1.691 - 1.710
Reducing Substances Passes Test
Volatile Acids (ueq/g) 0.16 max.
Chloride (Cl) 1 ppm max.
Nitrate (NO3) 2 ppm max.
Sulfate (SO4) 12 ppm max.
Trace Impurities (in ppm):
Aluminum (Al) 0.5 max.
Antimony (Sb) 10 max.
Arsenic (As) 0.05 max.
Calcium (Ca) 1.5 max.
Chromium (Cr) 0.2 max.
Cobalt (Co) 0.05 max.
Copper (Cu) 0.05 max.
Gold (Au) 0.3 max.
Heavy Metals (as Pb) 5 max.
Iron (Fe) 2 max.
Lead (Pb) 0.3 max.
Lithium (Li) 0.1 max.
Magnesium (Mg) 0.2 max.
Manganese (Mn) 0.1 max.
Nickel (Ni) 0.2 max.
Potassium (K) 1.5 max.
Sodium (Na) 2.5 max.
Strontium (Sr) 0.1 max.
Titanium (Ti) 0.3 max.
Zinc (Zn) 2 max.
For Microelectronic Use

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