KemLab™ HARP™ DEV1-3-4L PMMA Photoresist Developer, 1:3 MIBK:IPA, 4L Bottle

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Item Number:KEM-1-3-HARP-DEV-4L
Manufacturer Part No:MIBK/IPA3-DEVEL-4L
Manufacturer:KemLab
Units:4L Bottle

Details

  • KemLab™ HARP™ PMMA photoresist developer with a 1:3 ratio of MIBK and IPA.
  • Highest Resolution / Slow Develop
  • Designed for use with KemLab™ HARP™ PMMA and Copolymer e-Beam Positive Photoresists
  • Immersion, Puddle and Spray development techniques recommended.
  • Example Development Process: (1) 60-sec immersion in MIBK/IPA (2) 30-sec rinse with IPA (3) Spin dry or N2 blow dry.
  • 4L Bottle

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