KemLab™ KL NPR Straight Wall Negative Photoresists

KemLab™ KL NPR Straight Wall Negative Photoresist is a negative tone, novolac photoresist designed for electroplating, metal deposition, TSV, and RIE etch. It has a single coat film thickness of up to 20um and features vertical sidewalls and high aspect ratios. KemLab™ KL NPR negative photoresist is thermally stable and can withstand temperatures up to 130°C without profile degradation. Tone: Negative; Film Thickness: Up to 20 microns; Applications: TSV, electroplating, metal deposition, RIE etch.